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Journal paper
Entry Year94
Journal levelSCI
Paper title (chapter)Argon ion beam voltage in a dual ion beam sputtering system influence on the aluminum nitride films microstructure
Name of journalVacuum
number of chapters78
Starting page539
Starting page53
Name of author (Chinese)Chen, Hong-Ying
Name of author (English)Chen, Hong-Ying
AuthorsS. Han, H.-Y. Chen, Han C. Shih
Number of authors3
Author's typeOther
Attached File File download Word
Reference URLhttp://www.sciencedirect.com/science/article/pii/S0042207X05001004
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