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Journal paper
Entry Year94
Journal levelSCI
Paper title (chapter)Oxidation Behavior of Titanium Nitride Films
Name of journalJ. Vac. Sci. Technol. A
number of chapters23
Starting page1006
Starting page1009
Name of author (Chinese)Chen, Hong-Ying
Name of author (English)Chen, Hong-Ying
AuthorsH.-Y. Chen and F.-H. Lu
Number of authors2
Author's typeFirst Author
Attached File File download Word
Reference URLhttp://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=4923665&abstractAccess=no&userType=inst
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