Journal paper
Entry Year95
Journal levelSCI
Paper title (chapter)Argon Ion Beam Voltages Influence the Microstructure of Aluminum Nitride Films in a Dual Ion Beam Sputtering System
Name of journalNuclear Inst. Methods in Physics Research B
number of chapters242
Starting page396
Starting page398
Name of author (Chinese)Chen, Hong-Ying
Name of author (English)Chen, Hong-Ying
AuthorsH.-Y. Chen, S. Han, and H.-C. Shih
Number of authors3
Author's typeFirst Author
Attached File File download Word
Reference URLhttp://www.sciencedirect.com/science/article/pii/S0168583X05015570
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