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Journal paper
Entry Year95
Journal levelSCI
Paper title (chapter)The characterization of aluminum nitride thin films prepared by dual ion beam sputtering
Name of journalSurf. Coat. Technol.
number of chapters200
Starting page3326
Starting page3329
Name of author (Chinese)Chen, Hong-Ying
Name of author (English)Chen, Hong-Ying
AuthorsH.-Y. Chen, S. Han, and H.-C. Shih
Number of authors3
Author's typeFirst Author
Attached File File download Word
Reference URLhttp://www.sciencedirect.com/science/article/pii/S0257897205007322
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