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Journal paper
Entry Year98
Journal level其他
Paper title (chapter)半導體產業排放含氟氣體及其二次污染物之處理技術
Name of journal化工技術
Date of publication2009-06-00
Issue No.195
Starting page118
Starting page127
Name of author (Chinese)Tsai, Cheng-Hsian
Name of author (English)Tsai, Cheng-Hsian
Authors王雅玢、蔡政賢、李文智、楊錫賢
Author's typeOther
Attached File File download Word
Reference URLhttp://www.mmmpc.com.tw/yuehyin/MagSummary.aspx?ID=475&MID=9323
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